unsupported function = -1
init seq   2688,  0xa80 STD.reset_regs                 1998.08.17_12:00:00
init seq   2208,  0x8a0 STD.amplifierA                 1998.08.17_12:00:00
init seq   2880,  0xb40 STD.ISS_close_loop             1998.08.17_12:00:04
unsupported function = 265
init seq   4449, 0x1161 STD.fdm.bulletproof            1998.08.17_12:05:00
STOP sequence, priority = 1                                1998.08.17_12:49:30
unsupported function = 265
init seq   4528, 0x11b0 STD.flare1600                  1998.08.17_12:55:00
STOP sequence, priority = 1                                1998.08.17_15:55:02
unsupported function = 265
init seq   4306, 0x10d2 CJS.EUV.WLtracking.1x1         1998.08.17_16:00:00
unsupported function = 264
STOP sequence, priority = 1                                1998.08.18_11:55:00
init seq   2688,  0xa80 STD.reset_regs                 1998.08.18_11:59:50

frame, image count = 5645, 8838
MAIN storage 1249.618, SMALL 187.343, TOTAL 1436.968 Mbytes
duration = 24.00 hours (23:59:50), terminated by end of sequence
data rates: MAIN 52.07, SMALL 7.81, TOTAL 59.88 Mbytes/hour